Invention Grant
- Patent Title: VCSEL-based resonant-cavity-enhanced atomic force microscopy active optical probe
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Application No.: US16031328Application Date: 2018-07-10
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Publication No.: US10663485B1Publication Date: 2020-05-26
- Inventor: Alexander A. Ukhanov , Gennady A. Smolyakov
- Applicant: Alexander A. Ukhanov , Gennady A. Smolyakov
- Applicant Address: US NM Albuquerque
- Assignee: ACTOPROBE LLC
- Current Assignee: ACTOPROBE LLC
- Current Assignee Address: US NM Albuquerque
- Main IPC: G01Q60/40
- IPC: G01Q60/40 ; G01Q60/42 ; H01S5/183 ; G01Q60/06 ; G01Q70/02 ; H01S5/022 ; G01Q70/10
Abstract:
A new resonant-cavity-enhanced Atomic Force Microscopy (AFM) active optical probe integrates a semiconductor laser source and an aperture AFM/near-field scanning optical microscopy (NSOM) probe in either external-resonant-cavity or internal-resonant-cavity configuration to enable both conventional AFM measurements and optical imaging and spectroscopy at the nanoscale.
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