Invention Grant
- Patent Title: Polishing apparatus
-
Application No.: US16248599Application Date: 2019-01-15
-
Publication No.: US10663287B2Publication Date: 2020-05-26
- Inventor: Toshifumi Kimba , Nobuyuki Takahashi , Masaki Kinoshita
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@28afa166
- Main IPC: G01B11/06
- IPC: G01B11/06 ; B24B37/005 ; B24B49/12 ; H01L21/67 ; B24B37/34 ; G02B6/26 ; G02B6/35

Abstract:
A polishing apparatus capable of accurately measuring a film thickness by regulating a quantity of light illuminating a wafer is disclosed. The polishing apparatus includes: a light source; an illuminating fiber having distal ends arranged at different locations in the polishing table; and a light-receiving fiber having distal ends arranged at the different locations in the polishing table. The illuminating fiber includes a first illuminating fiber and a second illuminating fiber. A first dimmer is attached to the first illuminating fiber and the second illuminating fiber, and a second dimmer is attached to at least one of the first illuminating fiber and the second illuminating fiber.
Public/Granted literature
- US20190219381A1 POLISHING APPARATUS Public/Granted day:2019-07-18
Information query