Invention Grant
- Patent Title: Imprint system and method of manufacturing article
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Application No.: US14927547Application Date: 2015-10-30
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Publication No.: US10661486B2Publication Date: 2020-05-26
- Inventor: Takuro Yamazaki , Tomomi Funayoshi , Hiromitsu Yamaguchi , Masayoshi Fujimoto
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7df90184
- Main IPC: B29C43/58
- IPC: B29C43/58 ; G03F7/00

Abstract:
The present invention provides an imprint system including a processing unit configured to perform an imprint process, the processing unit including a dispenser configured to supply a droplet of an imprint material onto a substrate, a library configured to manage a plurality of different maps each indicating at least one of a supply position and a supply amount for a droplet to be supplied on the substrate from the dispenser, and a control unit configured to select one map to be used in the imprint process from the plurality of maps managed in the library based on information about a change of a result of the imprint process caused by a temporal change of at least one of a mold and the dispenser.
Public/Granted literature
- US20160129614A1 IMPRINT SYSTEM AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2016-05-12
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