Provided is a substrate liquid processing apparatus includes a processing liquid flow path through which a processing liquid flows; a cleaning fluid supply unit that supplies a cleaning fluid into the processing liquid flow path to thereby clean at least a part of the processing liquid flow path; a heater that heats the processing liquid; and a controller that controls the cleaning fluid supply unit and the heater. The controller controls the heater to heat the processing liquid to a temperature higher than a temperature at which crystallization is caused by a reaction between the processing liquid and the cleaning fluid, such that the heated processing liquid is supplied into the processing liquid flow path which retains the processing liquid of the temperature at which crystallization is caused by the reaction, and then controls the cleaning fluid supply unit to supply the cleaning fluid into the processing liquid flow path.