Invention Grant
- Patent Title: Thin film capacitors for core and adjacent build up layers
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Application No.: US15811852Application Date: 2017-11-14
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Publication No.: US10660209B2Publication Date: 2020-05-19
- Inventor: Charles L. Arvin , Brian W. Quinlan , Charles L. Reynolds , Jean Audet , Francesco Preda
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Peter Edwards
- Main IPC: H05K1/18
- IPC: H05K1/18 ; H01G4/33 ; H05K1/11 ; H05K3/40 ; H05K3/00 ; H05K3/30 ; H05K1/16 ; H05K1/02

Abstract:
A method includes affixing a capacitor sheet adjacent to core material of a device substrate, where the capacitor sheet covers a surface of the core material. The method also includes patterning first openings through both capacitor sheet and the core material, where the first openings are larger than a substrate pass through-hole. The method additionally includes filling the first openings with an electrically inert material. The method further includes patterning a second openings parallel to the first openings through the electrically inert material, where the second openings are at least as large as the substrate pass through-hole and having sidewalls enclosed within the electrically inert material.
Public/Granted literature
- US20190150287A1 THIN FILM CAPACITORS FOR CORE AND ADJACENT BUILD UP LAYERS Public/Granted day:2019-05-16
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