Described are solid-state energy storage devices and methods of making solid-state energy storage devices in which components of the batteries are truly solid-state and do not comprise a gel. Useful electrodes include metals and metal oxides, and useful electrolytes include amorphous ceramic thin film electrolytes that permit conduction or migration of ions across the electrolyte. Disclosed methods of making solid-state energy storage devices include multi-stage deposition processes, in which an electrode is deposited in a first stage and an electrolyte is deposited in a second stage.