Invention Grant
- Patent Title: Dedicated contacts for controlled electroforming of memory cells in resistive random-access memory array
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Application No.: US16397502Application Date: 2019-04-29
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Publication No.: US10658585B2Publication Date: 2020-05-19
- Inventor: Takashi Ando , Lawrence A. Clevenger , Chih-Chao Yang , Benjamin D. Briggs
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Vazken Alexanian
- Main IPC: H01L45/00
- IPC: H01L45/00 ; G11C13/00 ; H01L27/24

Abstract:
Methods and devices are provided for fabricating a resistive random-access array having dedicated electroforming contacts. A lower conductive line is formed on an interlayer dielectric layer. A lower electrode is formed on the lower conductive line. An isolation layer is formed having an upper surface which is coplanar with an upper surface of the lower electrode. A stack structure including a metal-oxide layer and upper electrode is formed on the lower electrode. Insulating spacers are formed on sidewalls of the stack structure. The lower electrode, and stack structure form a resistive memory cell, wherein a footprint of the lower electrode is greater than that of the upper electrode. An upper conductive line contacts the upper electrode, and is arranged orthogonal to the lower conductive line. A dedicated electroforming contact contacts an extended portion of the lower electrode which extends past a cross-point of the upper and lower conductive lines.
Public/Granted literature
- US20190259943A1 DEDICATED CONTACTS FOR CONTROLLED ELECTROFORMING OF MEMORY CELLS IN RESISTIVE RANDOM-ACCESS MEMORY ARRAY Public/Granted day:2019-08-22
Information query
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