A semiconductor device may include a semiconductor substrate, an upper electrode and a lower electrode. The semiconductor substrate may include: a p-type anode region being in contact with the upper electrode; an n-type cathode region being in contact with the lower electrode; an n-type drift region interposed between the anode region and the cathode region. The semiconductor substrate may further include a barrier region interposed between the anode region and the drift region; and an n-type pillar region extending between the barrier region and the upper electrode. The barrier region may include a multi-layer structure in which a p-type second barrier layer is interposed between an n-type first barrier layer and an n-type third barrier layer. The first barrier layer may be in contact with the anode region and is connected to the upper electrode via the pillar region.