Invention Grant
- Patent Title: Vertical fin type bipolar junction transistor (BJT) device with a self-aligned base contact
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Application No.: US16157928Application Date: 2018-10-11
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Publication No.: US10658495B2Publication Date: 2020-05-19
- Inventor: Injo Ok , Choonghyun Lee , Soon-Cheon Seo , Sungjae Lee
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/73
- IPC: H01L29/73 ; H01L29/08 ; H01L29/66 ; H01L29/205 ; H01L29/225 ; H01L21/324 ; H01L21/477 ; H01L21/02 ; H01L29/737 ; H01L29/165

Abstract:
A method of forming a silicon-germanium heterojunction bipolar transistor (hbt) device is provided. The method includes forming a stack of four doped semiconductor layers on a semiconductor substrate. The method further includes forming a dummy emitter contact and contact spacers on a fourth doped semiconductor layer of the stack of four doped semiconductor layers, and removing portions of the second, third, and fourth semiconductor layers to form a vertical fin. The method further includes recessing the second and fourth doped semiconductor layers, and depositing a condensation layer on the second, third, and fourth doped semiconductor layers. The method further includes reacting the condensation layer with the third doped semiconductor layer to form a protective segment on a condensed protruding portion.
Information query
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