Invention Grant
- Patent Title: Method for manufacturing OLED backplane comprising active layer formed of first, second, and third oxide semiconductor layers
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Application No.: US15742814Application Date: 2017-11-29
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Publication No.: US10658446B2Publication Date: 2020-05-19
- Inventor: Fangmei Liu
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Shenzhen
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Shenzhen
- Agency: Hemisphere Law, PLLC
- Agent Zhigang Ma
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3ede9295
- International Application: PCT/CN2017/113513 WO 20171129
- International Announcement: WO2019/080252 WO 20190502
- Main IPC: H01L27/32
- IPC: H01L27/32 ; H01L51/52 ; H01L51/56 ; H01L21/02 ; H01L21/383 ; H01L21/443 ; H01L21/4757 ; H01L27/12 ; H01L29/24 ; H01L29/786

Abstract:
A method for manufacturing an organic light-emitting diode (OLED) backplane is provided. The method includes sequentially depositing a first oxide semiconductor layer, a second oxide semiconductor layer and a third oxide semiconductor layer to obtain an active layer of a thin film transistor. The flow ratio of an argon gas and an oxygen gas introduced during the deposition of the first and third oxide semiconductor layers is greater than the flow ratio of the argon gas and the oxygen gas introduced during the deposition of the second oxide semiconductor layer. As a result, the oxygen content of the first and third oxide semiconductor layers is greater than the oxygen content of the second oxide semiconductor layer. Therefore, the conductivity of the active layer of the thin film transistor device is enhanced. The interface defects are reduced. The stability of the thin film transistor device is improved.
Public/Granted literature
- US20190386083A1 METHOD FOR MANUFACTURING OLED BACKPLANE Public/Granted day:2019-12-19
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