Invention Grant
- Patent Title: Detection of foreign particles during wire bonding
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Application No.: US15807899Application Date: 2017-11-09
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Publication No.: US10658328B2Publication Date: 2020-05-19
- Inventor: Tact Lee , Chin Kei Lai , Chung Yan Lau
- Applicant: ASM Technology Singapore Pte Ltd
- Applicant Address: SG Singapore
- Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: H01L23/00
- IPC: H01L23/00 ; G06T7/00

Abstract:
A method of bonding wires onto surfaces, an apparatus and a computer program product are disclosed. The method of bonding wires onto surfaces, comprises the steps of: collecting operating characteristics of a bonding tool while forming a wire bond which bonds a wire to a surface; determining whether a possible bonding failure of the wire bond has occurred as indicated by the operating characteristics; and capturing an image of the wire bond to identify whether a foreign body is present on the surface if it is determined that a possible bonding failure has occurred. In this way, imaging of the wire bond is only necessary when the operating characteristics indicate a suspect bonding failure has occurred. This avoids the need to image every bond, while still imaging suspect bonds. This approach helps to significantly increase the throughput of the wire bonding apparatus whilst still identifying and classifying bonding defects due to the presence of a foreign body.
Public/Granted literature
- US20190139929A1 DETECTION OF FOREIGN PARTICLES DURING WIRE BONDING Public/Granted day:2019-05-09
Information query
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