Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16126064Application Date: 2018-09-10
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Publication No.: US10658295B2Publication Date: 2020-05-19
- Inventor: Tomoya Kawai , Takashi Ishida , Shuichi Toriyama
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2b53e7da
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L23/528 ; H01L27/11573 ; H01L27/11582 ; G11C16/08 ; G11C16/14 ; H01L27/1157 ; G11C16/04

Abstract:
According to one embodiment, a semiconductor memory device includes a first interconnect layer, a first insulating layer, a second interconnect layer, and a memory pillar including a second insulating layer, a charge storage layer, and a third insulating layer stacked on a part of a side surface and on the bottom surface of the memory pillar, and a first silicide layer in contact with the first interconnect layer, a semiconductor layer, and a second silicide layer stacked in order along a first direction. A height position of a bottom surface of the first silicide layer is lower than a top surface of the first interconnect layer, and a height position of a top surface of the first silicide layer is higher than a bottom surface of the second interconnect layer.
Public/Granted literature
- US20190295956A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-09-26
Information query
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