Device transferring method
Abstract:
A device transferring method for transferring a plurality of devices to a mounting substrate provided with a plurality of electrodes includes: a step of adhering an expandable tape to the plurality of devices formed on a front surface side of a substrate through a buffer layer; a step of applying a laser beam to the buffer layer from a back surface side of the substrate, to break the buffer layer; a step of moving the tape in a direction for spacing away from the substrate to separate the substrate and the plurality of devices from each other, thereby transferring the plurality of devices to the tape; a step of expanding the tape in such a manner that the layout of the plurality of devices corresponds to the layout of the plurality of electrodes; and a step of bonding the plurality of devices to the plurality of electrodes at once.
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