Invention Grant
- Patent Title: Device transferring method
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Application No.: US16289929Application Date: 2019-03-01
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Publication No.: US10658220B2Publication Date: 2020-05-19
- Inventor: Tasuku Koyanagi , Akihito Kawai
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@76b8d6b0
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/78 ; H01L21/304 ; B23K26/57 ; H01S5/02 ; H01L33/00

Abstract:
A device transferring method for transferring a plurality of devices to a mounting substrate provided with a plurality of electrodes includes: a step of adhering an expandable tape to the plurality of devices formed on a front surface side of a substrate through a buffer layer; a step of applying a laser beam to the buffer layer from a back surface side of the substrate, to break the buffer layer; a step of moving the tape in a direction for spacing away from the substrate to separate the substrate and the plurality of devices from each other, thereby transferring the plurality of devices to the tape; a step of expanding the tape in such a manner that the layout of the plurality of devices corresponds to the layout of the plurality of electrodes; and a step of bonding the plurality of devices to the plurality of electrodes at once.
Public/Granted literature
- US20190273009A1 DEVICE TRANSFERRING METHOD Public/Granted day:2019-09-05
Information query
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