Invention Grant
- Patent Title: Transfer system and transfer method
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Application No.: US16451009Application Date: 2019-06-25
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Publication No.: US10658216B2Publication Date: 2020-05-19
- Inventor: Osamu Komiyaji , Hiroki Sanemasa
- Applicant: KABUSHIKI KAISHA YASKAWA DENKI
- Applicant Address: JP Kitakyushu-Shi
- Assignee: KABUSHIKI KAISHA YASKAWA DENKI
- Current Assignee: KABUSHIKI KAISHA YASKAWA DENKI
- Current Assignee Address: JP Kitakyushu-Shi
- Agency: Mori & Ward, LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; B25J9/00 ; H01L21/687 ; B65G47/90

Abstract:
A transfer system includes a transfer chamber having transfer positions, a first robot provided in the transfer chamber to transfer articles between the transfer positions, a second robot provided in the transfer chamber to transfer articles between the transfer positions, and a retreat unit configured to move one robot among the first robot and the second robot to a retreat position by changing a height of the one robot such that the one robot does not interfere with an operating range of another robot among the first robot and the second robot.
Public/Granted literature
- US20200051846A1 TRANSFER SYSTEM AND TRANSFER METHOD Public/Granted day:2020-02-13
Information query
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