A method of forming patterns is provided. The method may include forming a resist layer on a substrate and curing an extrusion confining pattern to define anchoring regions in the resist layer. The template may overlay over the resist layer. the template may include transfer patterns and anchor patterns. The template may be pressed to imprint the anchor patterns on the anchoring regions and to imprint the transfer patterns on a portion of the resist layer. An alignment may be performed to align the template with the resist layer.