Invention Grant
- Patent Title: Resist stripper and resist stripping method
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Application No.: US15818211Application Date: 2017-11-20
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Publication No.: US10656519B2Publication Date: 2020-05-19
- Inventor: Yoshihiro Mukai
- Applicant: Nagase ChemteX Corporation
- Applicant Address: JP Osaka
- Assignee: Nagase ChemteX Corporation
- Current Assignee: Nagase ChemteX Corporation
- Current Assignee Address: JP Osaka
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@54eda1d3 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@c0b8bff
- Main IPC: G03F7/42
- IPC: G03F7/42 ; G03F7/00 ; H01L21/311 ; C11D7/50 ; H01L21/4763

Abstract:
An object of the present invention is to provide a resist stripper for stripping resist from a substrate with a metallic line and/or a metal oxide film, which has excellent stripping properties and shows reduced reattachment of stripped resist, and which is also excellent in antifoaming properties. The resist stripper contains: (A) an amine; (B) an organic solvent; and (C) 5.0 wt % or less of a sulfonic or carboxylic acid having a weight average molecular weight of 5,000 to 1,000,000 or a salt thereof, and the resist stripper is free of (D) water, or contains (D) 60 wt % or less of water.
Public/Granted literature
- US20180143531A1 RESIST STRIPPER AND RESIST STRIPPING METHOD Public/Granted day:2018-05-24
Information query
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