Invention Grant
- Patent Title: Methods of simultaneously forming bottom and top spacers on a vertical transistor device
-
Application No.: US15840835Application Date: 2017-12-13
-
Publication No.: US10651293B2Publication Date: 2020-05-12
- Inventor: John H. Zhang
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L29/66 ; H01L29/786 ; H01L29/78 ; H01L29/165

Abstract:
A vertical transistor device includes a vertically oriented channel semiconductor structure, a bottom source/drain (S/D) region, a top source/drain (S/D) region, and a gate structure positioned around the vertically oriented channel semiconductor structure, above the bottom source/drain (S/D) region, and below the top source/drain (S/D) region. The gate structure includes a gate electrode and a gate insulation layer positioned between the gate electrode and at least a portion of the vertically oriented channel semiconductor structure. A top spacer is positioned between the gate electrode and at least a portion of the top source/drain (S/D) region, a bottom spacer is positioned between the gate electrode and at least a portion of the bottom source/drain (S/D) region, and a gate cap is positioned around an outer perimeter surface of the gate structure, wherein the top spacer, the bottom spacer, and the gate cap all include a same insulating material.
Public/Granted literature
- US20180114850A1 METHODS OF SIMULTANEOUSLY FORMING BOTTOM AND TOP SPACERS ON A VERTICAL TRANSISTOR DEVICE Public/Granted day:2018-04-26
Information query
IPC分类: