Invention Grant
- Patent Title: Three-dimensional multilevel device containing seamless unidirectional metal layer fill and method of making same
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Application No.: US16183920Application Date: 2018-11-08
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Publication No.: US10651196B1Publication Date: 2020-05-12
- Inventor: Rahul Sharangpani , Fei Zhou , Raghuveer S. Makala , Adarsh Rajashekhar
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11578
- IPC: H01L27/11578 ; H01L27/11582 ; H01L27/1157 ; H01L27/11565 ; H01L21/768 ; H01L27/11556 ; H01L27/11519 ; H01L27/11524

Abstract:
A vertical repetition of a unit layer stack including an insulating layer, a sacrificial material layer, and a nucleation promoter layer is formed over a substrate. Memory stack structures are formed through the vertical repetition. Each of the memory stack structures comprises a memory film and a vertical semiconductor channel. Backside recesses are formed by removing the sacrificial material layers selective to the insulating layers and the nucleation promoter layers within the vertical repetition. Electrically conductive layers are formed in the backside recesses by selectively growing a metallic material from physically exposed surfaces of the nucleation promoter layers while suppressing growth of the metallic material from physically exposed surfaces of the insulating layers.
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