Invention Grant
- Patent Title: Semiconductor memory device
-
Application No.: US16124553Application Date: 2018-09-07
-
Publication No.: US10651190B2Publication Date: 2020-05-12
- Inventor: Hidenobu Nagashima
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2193c85b
- Main IPC: H01L27/11575
- IPC: H01L27/11575 ; H01L27/11573 ; H01L21/762 ; H01L27/11565 ; H01L23/535 ; H01L21/768 ; H01L27/11582 ; H01L21/311

Abstract:
According to one embodiment, a semiconductor memory device includes a stacked body, memory pillars, first and second insulation layers and an isolation region. The stacked body above a substrate includes conductive layers isolated from each other and stacked along a first direction crossing the substrate surface. The memory pillars extend through the stacked body along the first direction. The first insulation layer is provided above the memory pillars. The isolation region is provided higher than upper surfaces of the memory pillars in the stacked body along the first direction, and isolates the stacked body in a second direction crossing the first direction. The second insulation layer is provided on the first insulation layer and a side wall of the isolation region.
Public/Granted literature
- US20190296034A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-09-26
Information query
IPC分类: