Semiconductor structure and manufacturing method thereof
Abstract:
The present disclosure provides a semiconductor structure and a method for manufacturing the semiconductor structure. The semiconductor structure includes a semiconductor substrate, a dielectric layer, a barrier layer, and a conductive layer. The semiconductor substrate has a plurality of mesas. The dielectric layer is disposed over the semiconductor substrate and has a plurality of blocks disposed over the mesas, respectively. The barrier layer is formed over a first lateral surface of the mesa, a second lateral surface of the block, an upper surface of the semiconductor substrate adjacent to the first lateral surface, and a front surface of the dielectric layer adjacent to the second lateral surface. The conductive layer has a base and a plurality of protrusions extending from the base and in contact with the barrier layer disposed over the upper surface, the first lateral surface, and the second lateral surface. A grain size of the base and the protrusions is consistent.
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