Invention Grant
- Patent Title: Detachable gas injector used for semiconductor equipment
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Application No.: US15920127Application Date: 2018-03-13
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Publication No.: US10651016B2Publication Date: 2020-05-12
- Inventor: Tsan-Hua Huang , Chia-Ying Lin
- Applicant: HERMES-EPITEK CORPORATION
- Applicant Address: TW Taipei
- Assignee: Hermes-Epitek Corporation
- Current Assignee: Hermes-Epitek Corporation
- Current Assignee Address: TW Taipei
- Agency: Stout, Uxa & Buyan, LLP
- Agent Donald E. Stout
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1c7767d6
- Main IPC: C23C16/40
- IPC: C23C16/40 ; H01J37/32 ; C23C16/455

Abstract:
A detachable gas injector adaptable to semiconductor equipment includes a top cover, a hollow sleeve, a top housing and a gas output unit. The hollow sleeve receives a convex part of the top cover, thus forming a first transmission passage between the hollow sleeve and the convex part. The top housing has a center hole for accommodating the hollow sleeve, thus forming a second transmission passage between the hollow sleeve and the center hole. The gas output unit is connected to a bottom surface of the hollow sleeve. The gas output unit includes a first partition plate and a second partition plate, which form a first gas output layer, a second gas output layer and a third gas output layer.
Public/Granted literature
- US20180269036A1 DETACHABLE GAS INJECTOR USED FOR SEMICONDUCTOR EQUIPMENT Public/Granted day:2018-09-20
Information query
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