Invention Grant
- Patent Title: Cryogenic cell for mounting a specimen in a charged particle microscope
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Application No.: US16166242Application Date: 2018-10-22
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Publication No.: US10651007B2Publication Date: 2020-05-12
- Inventor: Gerbert Jeroen Van De Water , Roland W. P Jonkers , Gijs Van Duinen , Stephanus H. L. Van Den Boom , Fotios Sakellariou
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@62fbb6e6
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26

Abstract:
A method of examining a cryogenic specimen in a Charged Particle Microscope, comprising: Providing the specimen in a cryogenic cell on a specimen holder; Directing a charged particle beam from a source and along an axis through an evacuated beam conduit of an illuminator system so as to irradiate at least a portion of the specimen therewith; Using a detector to detect radiation emanating from the specimen in response to said irradiation, further comprising: Configuring said cell to comprise an elongate tube that extends within said beam conduit into said illuminator system and encloses said axis; Maintaining said tube at a cryogenic temperature at least during said irradiation.
Public/Granted literature
- US20190131105A1 CRYOGENIC CELL FOR MOUNTING A SPECIMEN IN A CHARGED PARTICLE MICROSCOPE Public/Granted day:2019-05-02
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