Invention Grant
- Patent Title: Method and apparatus for assembling multilayer microlens array elements
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Application No.: US15659377Application Date: 2017-07-25
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Publication No.: US10647073B2Publication Date: 2020-05-12
- Inventor: Xiaofeng Yuan , Qiang Wu
- Applicant: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION , SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Applicant Address: CN Shanghai CN Beijing
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1f2ad1f2
- Main IPC: B29D11/00
- IPC: B29D11/00 ; G02B27/62 ; G02B3/00 ; G02B7/02 ; G02B7/00 ; G02B1/04 ; G02B6/42 ; G02B13/00 ; G02B17/08 ; G02B27/32
Abstract:
A method for assembling a microlens array assembly including a set of microlens array elements having at least two array elements having a first array element and a second array element includes adsorbing the first array element using a mobile platform, adsorbing the second array element using a fixture platform, coarsely aligning the second array element with the first array element based on edges of the second array element and edges of the first array element, finely aligning the second array element with the first array element based on an array pattern of the second array element and an array pattern of the first array element, and attaching the second array element to the first array element. The method enables assembling of multiple microlens array elements.
Public/Granted literature
- US20180079159A1 METHOD AND APPARATUS FOR ASSEMBLING MULTILAYER MICROLENS ARRAY ELEMENTS Public/Granted day:2018-03-22
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