Invention Grant
- Patent Title: Coating method
-
Application No.: US15956843Application Date: 2018-04-19
-
Publication No.: US10593548B2Publication Date: 2020-03-17
- Inventor: Shogo Yoshida , Hiroyuki Ogura , Ryuichi Yoshida
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2017-085142 20170424
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/027 ; G03F7/16 ; G03F7/38 ; H01L21/67
Abstract:
A coating method of coating a substrate with a chemical includes a solvent supplying step and a chemical supplying step. In the solvent supplying step, a solvent is supplied to the substrate. After the solvent supplying step, the chemical is supplied to the substrate in the chemical supplying step. The solvent supplying step includes a first step. The first step causes the substrate to rotate at a first rotation speed, causes a solvent nozzle to move between a central position above a center portion of the substrate and a peripheral position above a peripheral portion of the substrate, and causes the solvent nozzle to dispense the solvent.
Public/Granted literature
- US20180308678A1 COATING METHOD Public/Granted day:2018-10-25
Information query
IPC分类:
