Invention Grant
- Patent Title: Wafer processing method
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Application No.: US15824365Application Date: 2017-11-28
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Publication No.: US10586704B2Publication Date: 2020-03-10
- Inventor: Taewoo Bae
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2016-230792 20161129
- Main IPC: H01L21/268
- IPC: H01L21/268 ; B23K26/53 ; B23K26/00 ; H01L21/683 ; H01L23/544 ; H01L23/00 ; B23K101/40 ; B23K103/00

Abstract:
A processing method for a wafer having a plurality of streets inclined at 45° relative to a cleavage direction including a laser processing step of positioning a focusing point of a laser beam with a wavelength as to be transmitted through the wafer in the inside of the wafer, and applying the laser beam along the streets to form a plurality of modified layers, overlapping with one another in the wafer thickness direction, inside the wafer along each of the streets. In the laser processing step, m modified layers (m is a natural number not less than n·√2) are formed overlapping with one another in the wafer thickness direction, where n (n is a natural number) is the number of modified layers needing to be formed overlapping with one another in a wafer thickness direction when dividing a wafer having a plurality of streets parallel to a cleavage direction.
Public/Granted literature
- US20180151370A1 WAFER PROCESSING METHOD Public/Granted day:2018-05-31
Information query
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