- Patent Title: Semiconductor apparatus and charged particle ray exposure apparatus
-
Application No.: US16288319Application Date: 2019-02-28
-
Publication No.: US10586677B1Publication Date: 2020-03-10
- Inventor: Shiro Okada
- Applicant: Kabushiki Kaisha Toshiba , Toshiba Electronic Devices & Storage Corporation
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba,Toshiba Electronic Devices & Storage Corporation
- Current Assignee: Kabushiki Kaisha Toshiba,Toshiba Electronic Devices & Storage Corporation
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: White & Case LLP
- Priority: JP2018-170945 20180912
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/147 ; H01J37/317 ; G03F7/20 ; H01J37/20
Abstract:
A semiconductor apparatus according to an embodiment is a semiconductor apparatus including substrate having a recess provided at a first substrate face, a plurality of through holes provided in a predetermined region of the recess, and a plurality of protrusions provided on the recess in the predetermined region.
Public/Granted literature
- US20200083016A1 SEMICONDUCTOR APPARATUS AND CHARGED PARTICLE RAY EXPOSURE APPARATUS Public/Granted day:2020-03-12
Information query
