Invention Grant
- Patent Title: Calibration of directed self-assembly models using programmed defects of varying topology
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Application No.: US15883892Application Date: 2018-01-30
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Publication No.: US10586013B2Publication Date: 2020-03-10
- Inventor: Kafai Lai
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Vazken Alexanian
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01L21/027 ; G06F17/13

Abstract:
Techniques are provided for calibrating physical directed self-assembly (DSA) models. For example, an experimental DSA process is performed using a block copolymer (BCP) material and a DSA guiding pattern with a predefined defect formed as part of the DSA guiding pattern. A difference in size (e.g., shrinkage) is determined between a size of the predefined defect of the DSA guiding pattern and a remaining size of a morphological defect in the BCP material as assembled at a completion of the experimental DSA process. The difference in size is utilized as calibration data in a DSA simulation system to calibrate a simulated physical DSA model which defines a simulated DSA process that corresponds to the experimental DSA process. The simulated physical DSA model defines a simulated guiding pattern with a programmed defect, which corresponds to the DSA guiding pattern and the predefined defect.
Public/Granted literature
- US20190236237A1 CALIBRATION OF DIRECTED SELF-ASSEMBLY MODELS USING PROGRAMMED DEFECTS OF VARYING TOPOLOGY Public/Granted day:2019-08-01
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