Invention Grant
- Patent Title: Tunable lithium niobate resonators and filters via lithiation and delithiation
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Application No.: US15258712Application Date: 2016-09-07
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Publication No.: US10581404B2Publication Date: 2020-03-03
- Inventor: Ashwin Samarao
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Main IPC: H03H9/64
- IPC: H03H9/64 ; H03H9/25 ; H03H9/02
Abstract:
A surface acoustic wave (SAW) device includes a silicon substrate, a piezoelectric substrate formed of lithium niobate, an alumina layer interposed between the silicon substrate and the piezoelectric substrate, and at least one electrode on the piezoelectric substrate.
Public/Granted literature
- US20180069166A1 Tunable Lithium Niobate Resonators and Filters Via Lithiation and Delithiation Public/Granted day:2018-03-08
Information query
