Invention Grant
- Patent Title: Actuator system
-
Application No.: US15327692Application Date: 2015-07-22
-
Publication No.: US10580959B2Publication Date: 2020-03-03
- Inventor: Harry Marth , Patrick Pertsch , Oskar Xiabin Zhao
- Applicant: PHYSIK INSTRUMENTE (PI) GMBH & CO. KG
- Applicant Address: DE Karlsruhe
- Assignee: PHYSIK INSTRUMENTE (PI) GMBH & CO. KG
- Current Assignee: PHYSIK INSTRUMENTE (PI) GMBH & CO. KG
- Current Assignee Address: DE Karlsruhe
- Agency: Bodner & O'Rourke, LLP
- Agent Gerald T. Bodner; Christian P. Bodner
- Priority: DE102014214318 20140723; DE102014116708 20141114
- International Application: PCT/DE2015/200411 WO 20150722
- International Announcement: WO2016/012021 WO 20160128
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H01L41/09 ; H01L41/047

Abstract:
The invention relates to an actuator system comprising at least four electrically controllable, longitudinally adjustable actuators, to each of which a compressive force is applied in the direction of the longitudinal adjustment thereof by means of a separate housing that has an integrally formed resilient portion, each housing being designed as a single piece along with a base element shared by all housings. The invention further relates to an array comprising a plurality of actuator systems of said type.
Public/Granted literature
- US20170207382A1 ACTUATOR SYSTEM Public/Granted day:2017-07-20
Information query
IPC分类: