Invention Grant
- Patent Title: Arrangement with a component on a carrier substrate, an arrangement and a semi-finished product
-
Application No.: US14635200Application Date: 2015-03-02
-
Publication No.: US10580912B2Publication Date: 2020-03-03
- Inventor: Simon Maus , Ulli Hansen
- Applicant: MSG LITHOGLAS AG
- Applicant Address: DE Berlin
- Assignee: MSG LITHOGLAS AG
- Current Assignee: MSG LITHOGLAS AG
- Current Assignee Address: DE Berlin
- Agency: Schmeiser, Olsen & Watts, LLP
- Priority: DE102009042479 20090924
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L31/0232 ; H01L33/00 ; H01L33/60 ; H01L33/48 ; H01L23/00 ; H01L31/0203 ; H01L31/02 ; H01L33/58 ; H01L33/52
Abstract:
An arrangement including a carrier substrate, and a component situated on a cover surface of the carrier substrate in a hollow space, and electrical contacts for the component, wherein the hollow space is comprised of a plurality of spacer elements arranged on the cover surface of the carrier substrate and a cover substrate mounted on the plurality of spacer elements is provided. A semi-finished product comprising a carrier substrate made of silicon, wherein one or more recesses are formed on one side of the carrier substrate, and wherein the semi-finished product further comprises an alkaline evaporated glass applied to the side of the carrier substrate having the one or more recesses is also provided.
Public/Granted literature
- US20150179828A1 ARRANGEMENT WITH A COMPONENT ON A CARRIER SUBSTRATE, AN ARRANGEMENT AND A SEMI-FINISHED PRODUCT Public/Granted day:2015-06-25
Information query
IPC分类:
