Invention Grant
- Patent Title: Semiconductor-on-insulator transistor with improved breakdown characteristics
-
Application No.: US15920321Application Date: 2018-03-13
-
Publication No.: US10580903B2Publication Date: 2020-03-03
- Inventor: Hiroshi Yamada , Abhijeet Paul , Alain Duvallet
- Applicant: pSemi Corporation
- Applicant Address: US CA San Diego
- Assignee: pSemi Corporation
- Current Assignee: pSemi Corporation
- Current Assignee Address: US CA San Diego
- Agency: Jaquez Land Greenhaus LLP
- Agent John Land, Esq.
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L29/66 ; H01L27/12 ; H01L29/78 ; H01L29/786

Abstract:
Semiconductor-on-insulator field effect transistor (FET) integrated circuit (IC) structures and fabrication processes that mitigate or eliminate the problems caused by the secondary parasitic back-channel FET of conventional semiconductor-on-insulator FET IC structures. Embodiments enable full control of the secondary parasitic back-channel FET of semiconductor-on-insulator IC primary FETs. Embodiments include taking partially fabricated ICs made using a process which allows access to the back side of the FET, such as “single layer transfer” process, and then fabricating a conductive aligned supplemental (CAS) gate structure relative to the insulating layer juxtaposed to a primary FET such that a control voltage applied to the CAS gate can regulate the electrical characteristics of the regions of the primary FET adjacent the insulating layer. The IC structures present as a four or five terminal device: source S, drain D, primary gate G, CAS gate, and, optionally, a body contact.
Public/Granted literature
- US20190288119A1 Semiconductor-On-Insulator Transistor with Improved Breakdown Characteristics Public/Granted day:2019-09-19
Information query
IPC分类: