- Patent Title: Wafer level fan-out package and method of manufacturing the same
-
Application No.: US16574981Application Date: 2019-09-18
-
Publication No.: US10580742B2Publication Date: 2020-03-03
- Inventor: Peng Zhang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine, Whitt & Francos, PLLC
- Priority: CN201710144202 20170310
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/00 ; H01L21/56 ; H01L21/48 ; H01L23/31 ; H01L23/538 ; H01L23/13

Abstract:
A method of manufacturing a wafer level fan-out package includes preparing a base substrate having a protrusion, providing a chip on a surface of the base substrate adjacent to and spaced from the protrusion, forming an encapsulation layer on the base substrate to encapsulate the chip and the protrusion, removing the base substrate to expose a surface of the chip and to form a recess corresponding to the protrusion in the encapsulation layer, and providing a passive element in the recession. The method obviates a problem of displacement of the passive element by thermal expansion of the encapsulation layer while it is being formed because the passive element is incorporated into the package after the encapsulation layer is formed.
Public/Granted literature
- US20200013731A1 WAFER LEVEL FAN-OUT PACKAGE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-01-09
Information query
IPC分类: