Invention Grant
- Patent Title: Displacement detecting apparatus, displacement detecting method and substrate processing apparatus
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Application No.: US15663116Application Date: 2017-07-28
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Publication No.: US10580163B2Publication Date: 2020-03-03
- Inventor: Hiroaki Kakuma , Kazuhiro Kitamura
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2016-160979 20160819
- Main IPC: G06T7/73
- IPC: G06T7/73 ; H01L21/67 ; H01L21/68 ; B05B12/12 ; B05B13/04

Abstract:
A displacement detecting apparatus according to the invention comprises: a mover which moves and positions a positioning object; an imager which images an image including an imaging object which is the positioning object or an object displacing integrally with the positioning object as the positioning object is displaced; and a displacement detector which detects the imaging object from the image imaged by the imager and detects a displacement of the positioning object based on the position of the imaging object detected in the image, wherein the displacement detector obtains a displacement amount of the positioning object with respect to a predetermined reference position from a value obtained by multiplying a distance between the position of the imaging object and the reference position in the image by a coefficient determined according to size of the imaging object in the image.
Public/Granted literature
- US20180053319A1 DISPLACEMENT DETECTING APPARATUS, DISPLACEMENT DETECTING METHOD AND SUBSTRATE PROCESSING APPARATUS Public/Granted day:2018-02-22
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