- Patent Title: Imprint apparatus and method of controlling the same comprising a liquid position second measurement based on the timing measurement result by a first measurement
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Application No.: US15964528Application Date: 2018-04-27
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Publication No.: US10578985B2Publication Date: 2020-03-03
- Inventor: Hisashi Namba , Yuichi Takahashi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JP2017-092562 20170508
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F9/00 ; B82Y10/00 ; B82Y40/00
Abstract:
An imprint apparatus comprises: a dispensing unit that dispenses a liquid to a substrate; a first measurement unit that measures a time from when a signal for causing the liquid to be dispensed is outputted to the dispensing unit until when the dispensed liquid passes through a predetermined position; a second measurement unit that measures a position of the liquid on the substrate that is dispensed by the dispensing unit; and a control unit that controls the measurement by the first measurement unit and the second measurement unit, wherein the control unit performs measurement by the second measurement unit based on a measurement result by the first measurement unit.
Public/Granted literature
- US20180321604A1 IMPRINT APPARATUS AND METHOD OF CONTROLLING THE SAME Public/Granted day:2018-11-08
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