Invention Grant
- Patent Title: Optical element, in particular for a microlithographic projection exposure apparatus
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Application No.: US16447001Application Date: 2019-06-20
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Publication No.: US10578974B2Publication Date: 2020-03-03
- Inventor: Ralf Moser , Florian Herold , Arno Schmittner , Holger Kierey , Wolfgang Merkel , Georgo Metalidis
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102016226202 20161223
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G21K1/06 ; G02B5/08

Abstract:
The disclosure relates to an optical element, in particular for a microlithographic projection exposure apparatus. The optical element has an optical effective surface. The optical element includes a substrate, a layer system that is present on the substrate, and a protective cover extending over an edge region of the optical element that is adjacent to the optical effective surface. During operation of the optical element, the protective coating reduces an ingress of hydrogen radicals into the layer system in comparison with an analogous design without the protective cover, wherein a gap is formed between the protective cover and the layer system.
Public/Granted literature
- US20190302624A1 OPTICAL ELEMENT, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS Public/Granted day:2019-10-03
Information query
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