- Patent Title: Asymmetric template shape modulation for partial field imprinting
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Application No.: US14587370Application Date: 2014-12-31
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Publication No.: US10578964B2Publication Date: 2020-03-03
- Inventor: Mahadevan Ganapathisubramanian , Matthew M. Kincaid , Byung-Jin Choi , Sidlgata V. Sreenivasan
- Applicant: Canon Nanotechnologies, Inc.
- Applicant Address: US TX Austin
- Assignee: Canon Nanotechnologies, Inc.
- Current Assignee: Canon Nanotechnologies, Inc.
- Current Assignee Address: US TX Austin
- Agent Cameron A. King
- Main IPC: B29C59/00
- IPC: B29C59/00 ; G03F7/00
Abstract:
Systems and methods for partial field imprinting are provided such that imprint templates are asymmetrically modulated to allow initial contact with a partial field on a substrate at a location spaced apart from the template center.
Public/Granted literature
- US20150183151A1 Asymmetric Template Shape Modulation for Partial Field Imprinting Public/Granted day:2015-07-02
Information query
