Invention Grant
- Patent Title: Probe system and method for receiving a probe of a scanning probe microscope
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Application No.: US15828529Application Date: 2017-12-01
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Publication No.: US10578644B2Publication Date: 2020-03-03
- Inventor: Christof Baur , Sylvio Ruhm , Gabriel Baralia , Christoph Pohl , Björn Harnath , Matthias Weber
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102015210159 20150602
- Main IPC: G01Q70/00
- IPC: G01Q70/00 ; G01Q70/02

Abstract:
The invention relates to a probe system for a scanning probe microscope which (a) has a receptacle apparatus for a probe, (b) has a probe storage, which provides at least one probe for the scanning probe microscope, (c) wherein the probe, the probe storage, and the receptacle apparatus are embodied in such a way that the probe can form a releasable first connection with the probe storage and a releasable second connection with the receptacle apparatus, wherein the first connection and/or the second connection use a magnetic force; and wherein the receptacle apparatus and the probe storage are movable relative to one another in such a way for receiving the probe that the probe forms the second connection before the first connection is released.
Public/Granted literature
- US20180095108A1 PROBE SYSTEM AND METHOD FOR RECEIVING A PROBE OF A SCANNING PROBE MICROSCOPE Public/Granted day:2018-04-05
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