Invention Grant
- Patent Title: Thin film transistor and display device
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Application No.: US14416927Application Date: 2013-08-30
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Publication No.: US10566457B2Publication Date: 2020-02-18
- Inventor: Aya Miki , Shinya Morita , Hiroshi Goto , Toshihiro Kugimiya , Hiroaki Tao , Kenta Hirose
- Applicant: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- Applicant Address: JP Kobe-shi
- Assignee: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- Current Assignee: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-192667 20120831; JP2013-094088 20130426
- International Application: PCT/JP2013/073371 WO 20130830
- International Announcement: WO2014/034872 WO 20140306
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/8234

Abstract:
Provided is a thin film transistor comprising an oxide semiconductor thin film layer and has a threshold voltage that does not change much due to light, a bias stress or the like, thereby exhibiting excellent stress stability. A thin film transistor of the present invention is provided with: a gate electrode; an oxide semiconductor layer that is used as a channel layer; and a gate insulator film that is arranged between the gate electrode and the channel layer. The oxide semiconductor layer is configured of at least one metal element that is selected from the group consisting of In, Ga, Zn and Sn (excluding the cases where the oxide semiconductor layer is constituted of metal elements Sn, and at least one of In and Zn). The hydrogen concentration in the gate insulator film, which is in direct contact with the oxide semiconductor layer, is controlled to 4 atomic % or less.
Public/Granted literature
- US20150171221A1 THIN FILM TRANSISTOR AND DISPLAY DEVICE Public/Granted day:2015-06-18
Information query
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