Invention Grant
- Patent Title: Variable resistance memory device and method of manufacturing the same
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Application No.: US15990913Application Date: 2018-05-29
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Publication No.: US10566386B2Publication Date: 2020-02-18
- Inventor: Ji-Hyun Jeong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2017-0137413 20171023
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
A method of manufacturing a variable memory device includes forming a switching layer on a first conductive layer, forming a heating layer on the switching layer, the heating layer extending in a first direction, performing a first patterning process on the first conductive layer, the switching layer, and the heating layer to form a first trench extending in a second direction intersecting the first direction, forming variable resistance patterns on the heating layer, forming a second conductive layer on the variable resistance patterns, and performing a second patterning process on the switching layer, the heating layer, and the second conductive layer to form a second trench extending in the first direction and being between the variable resistance patterns.
Public/Granted literature
- US20190123277A1 VARIABLE RESISTANCE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2019-04-25
Information query
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