Invention Grant
- Patent Title: Semiconductor devices
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Application No.: US16257913Application Date: 2019-01-25
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Publication No.: US10566331B1Publication Date: 2020-02-18
- Inventor: Jung-gil Yang , Sang-su Kim , Sun-wook Kim , Geum-jong Bae , Seung-min Song , Soo-jin Jeong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2018-0092677 20180808
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/092 ; H01L29/08 ; H01L29/06 ; H01L29/66 ; H01L29/423 ; H01L21/8238 ; H01L21/02

Abstract:
A semiconductor device includes: a fin-type active area extending in a first direction protruding from a substrate; a plurality of nanosheet stacked structures; a blocking film covering a part of the upper surface and one sidewall of each of a pair of nanosheet stacked structures adjacent to both sides of the fin-type active area among the plurality of nanosheet stacked structures; a gate electrode extending in a second direction intersecting the first direction on the fin-type active area, the gate electrode including a real gate electrode surrounding the plurality of nanosheets and a dummy gate electrode disposed on the blocking film; and a gate dielectric layer between the real gate electrode and the plurality of nanosheets and between the dummy gate electrode and the blocking film.
Public/Granted literature
- US20200051981A1 SEMICONDUCTOR DEVICES Public/Granted day:2020-02-13
Information query
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