Invention Grant
- Patent Title: Multi-level stack having multi-level contact and method
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Application No.: US14828449Application Date: 2015-08-17
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Publication No.: US10566234B2Publication Date: 2020-02-18
- Inventor: Keith Lao
- Applicant: Samsung Austin Semiconductor LLC , Samsung Electronics Co., Ltd.
- Applicant Address: US TX Austin KR Suwon-si
- Assignee: Samsung Austin Semiconductor, LLC,Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Austin Semiconductor, LLC,Samsung Electronics Co., Ltd.
- Current Assignee Address: US TX Austin KR Suwon-si
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/522 ; H01L23/48

Abstract:
A method for forming a multi-level stack having a multi-level contact is provided. The method includes forming a multi-level stack comprising a specified number, n, of conductive layers and at least n−1 insulating layers. A via formation layer is formed over the stack. A first via is etched in the via formation layer at a first edge of the stack. A first multi-level contact is formed in the first via. For a particular embodiment, a second via may be etched in the via formation layer at a second edge of the stack and a second multi-level contact may be formed in the second via.
Public/Granted literature
- US20150357237A1 MULTI-LEVEL STACK HAVING MULTI-LEVEL CONTACT AND METHOD Public/Granted day:2015-12-10
Information query
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