Circular scratch inspection apparatus
Abstract:
A circular scratch inspection apparatus includes: a camera capturing an image of a workpiece surface around a hole; illumination device emitting light to the workpiece surface around the hole, the light being reflected on the workpiece surface is not directly incident on the camera; and image processor. The image processor: generates a second-derivative image by performing secondary differentiation on luminance values in an actual image obtained by the camera; generates a second-derivative curve for each of a plurality of ruler lines, extending radially from the hole center and are set in an inspection target region on the workpiece surface; counts a first reference number of times for each ruler line; calculates a first reference total number of times; and determines presence or absence of a circular scratch by using the first reference total number of times.
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