Invention Grant
- Patent Title: Process for electrochemically making at least one porous area of a micro and/or nanoelectronic structure
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Application No.: US14514703Application Date: 2014-10-15
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Publication No.: US10563319B2Publication Date: 2020-02-18
- Inventor: Eric Ollier , Frederic-Xavier Gaillard , Carine Marcoux
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1360078 20131016
- Main IPC: H01L21/3065
- IPC: H01L21/3065 ; C25F3/02 ; C25F3/12

Abstract:
A process for making at least one porous area (ZP) of a microelectronic structure in at least one part of an conducting active layer (6), the active layer (6) forming a front face of a stack, the stack comprising a back face (2) of conducting material and an insulating layer (4) interposed between the active layer (6) and the back face (2), said process comprising the steps of: a) making at least one contact pad (14) between the back face (2) and the active layer (6) through the insulation layer (2), b) placing the stack into an electrochemical bath, c) applying an electrical current between the back face (2) and the active layer (6) through the contact pad (14) causing porosification of an area (ZP) of the active layer (6) in the vicinity of the contact pad (14), d) forming the microelectronic structure.
Public/Granted literature
- US20150329986A1 PROCESS FOR ELECTROCHEMICALLY MAKING AT LEAST ONE POROUS AREA OF A MICRO AND/OR NANOELECTRONIC STRUCTURE Public/Granted day:2015-11-19
Information query
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