- Patent Title: Device for insulating and sealing electrode holders in CVD reactors
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Application No.: US15744180Application Date: 2016-10-10
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Publication No.: US10562778B2Publication Date: 2020-02-18
- Inventor: Dominik Rennschmid , Heinz Kraus , Christian Kutza
- Applicant: Wacker Chemie AG
- Applicant Address: DE Munich
- Assignee: WACKER CHEMIE AG
- Current Assignee: WACKER CHEMIE AG
- Current Assignee Address: DE Munich
- Agency: Brooks Kushman P.C.
- Priority: DE102015220127 20151015
- International Application: PCT/EP2016/074230 WO 20161010
- International Announcement: WO2017/064011 WO 20170420
- Main IPC: C23C16/24
- IPC: C23C16/24 ; C01B33/035 ; C23C16/44 ; C23C16/46
Abstract:
Improved sealing of Siemens reactor electrodes which results in improved reactor campaign times, is accomplished by use of an electrically insulating ring in combination with two seals, a first seal located in a groove in the insulating ring or in a groove in the reactor base plate adjacent the insulating ring, and a second seal not contained in a groove.
Public/Granted literature
- US20180208469A1 DEVICE FOR INSULATING AND SEALING ELECTRODE HOLDERS IN CVD REACTORS Public/Granted day:2018-07-26
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