A target supply apparatus according to one aspect of the present disclosure includes a nozzle configured to output a target, a plurality of vibrators including a first vibrator configured to vibrate the nozzle, a detection unit configured to detect a change in state of the target having been output from the nozzle, a vibrator switching unit configured to perform switching of a vibrator that vibrates the nozzle from the first vibrator to the other vibrator that is included in the vibrators and is different from the first vibrator, and a control unit configured to control the switching of the vibrator that vibrates the nozzle, based on the change in state of the target having been output from the nozzle, detected by the detection unit.