Invention Grant
- Patent Title: Multi-layered film, method of manufacturing the same, and manufacturing apparatus of the same
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Application No.: US15319597Application Date: 2015-06-11
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Publication No.: US10553777B2Publication Date: 2020-02-04
- Inventor: Hiroki Kobayashi , Mitsunori Henmi , Mitsutaka Hirose , Shinnosuke Mashima , Isao Kimura , Koukou Suu
- Applicant: ULVAC, INC.
- Applicant Address: JP Chigasaki-Shi
- Assignee: ULVAC, INC.
- Current Assignee: ULVAC, INC.
- Current Assignee Address: JP Chigasaki-Shi
- Agency: Grossman, Tucker, Perreault & Pfleger, PLLC
- Priority: JP2014-127469 20140620
- International Application: PCT/JP2015/066891 WO 20150611
- International Announcement: WO2015/194453 WO 20151223
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01L41/083 ; C23C14/58 ; H01L41/047 ; H01L41/297 ; H01L41/314

Abstract:
A multi-layered film includes a first electroconductive layer, a dielectric layer, and a second electroconductive layer, which are sequentially layered and disposed on a main surface of a substrate. A lower surface of the dielectric layer comes into contact with an upper surface of the first electroconductive layer, an upper surface and an side surface of the dielectric layer is coated with the second electroconductive layer, and an side end of a portion at which the first electroconductive layer directly overlaps the second electroconductive layer is located inside a side end of the substrate on the main surface of the substrate.
Public/Granted literature
- US20170141289A1 MULTI-LAYERED FILM, METHOD OF MANUFACTURING THE SAME, AND MANUFACTURING APPARATUS OF THE SAME Public/Granted day:2017-05-18
Information query
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