Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16128673Application Date: 2018-09-12
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Publication No.: US10553608B2Publication Date: 2020-02-04
- Inventor: Kenji Aoyama
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2018-033095 20180227
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11575

Abstract:
A semiconductor memory device includes a stacked body, a semiconductor member, a charge storage member, a first member, and second members. The stacked body includes electrode films arranged to be separated from each other along a first direction. A terrace is formed for each electrode film in an end portion of the stacked body in a second direction. The first member spreads along the first direction and the second direction. The first member is provided inside the cell portion. The second members are provided inside the end portion. The electrode film includes two portions separated from each other in a third direction. The two portions are separated in the third direction by the first member and the plurality of second members. An insulator between the electrode films is formed continuously between two sides of the plurality of second members in the third direction.
Public/Granted literature
- US20190267393A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-08-29
Information query
IPC分类: