Invention Grant
- Patent Title: Semiconductor devices
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Application No.: US15983405Application Date: 2018-05-18
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Publication No.: US10553593B2Publication Date: 2020-02-04
- Inventor: Deokhan Bae , Hyonwook Ra , Hyung Jong Lee , Juhun Park
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2017-0149280 20171110
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L23/522 ; G11C11/412 ; H01L27/092

Abstract:
A semiconductor device includes a substrate including active patterns, a device isolation layer filling a trench between a pair of adjacent active patterns, a gate electrode on the active patterns, and a gate contact on the gate electrode. Each active pattern includes source/drain patterns at opposite sides of the gate electrode. The gate contact includes a first portion vertically overlapping with the gate electrode, and a second portion laterally extending from the first portion such that the second portion vertically overlaps with the device isolation layer and does not vertically overlap with the gate electrode. A bottom surface of the second portion is distal to the substrate in relation to a bottom surface of the first portion. The bottom surface of the second portion is distal to the substrate in relation to a top of a source/drain pattern that is adjacent to the second portion.
Public/Granted literature
- US20190148384A1 SEMICONDUCTOR DEVICES Public/Granted day:2019-05-16
Information query
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