Fabrication method of a semiconductor structure by a gate cutting process with multiple sidewall spacers formation in a dummy gate opening
Abstract:
Semiconductor structure and fabrication method are provided. The method includes: providing a base substrate including a first region, a second region and a third region between the first and the second region; forming a dummy gate structure extending from the first region to the second region and through the third region; forming first doped source/drain regions in the base substrate on both sides of the dummy gate structure in the first region; forming second doped source/drain regions in the base substrate on both sides of the dummy gate structure in the second region; forming an opening in the dummy gate structure in the third region and exposing the base substrate in the third region; and forming an interlayer dielectric layer within the opening to have a top surface coplanar with the dummy gate structure.
Public/Granted literature
Information query
Patent Agency Ranking
0/0