Invention Grant
- Patent Title: Fabrication method of a semiconductor structure by a gate cutting process with multiple sidewall spacers formation in a dummy gate opening
-
Application No.: US15909419Application Date: 2018-03-01
-
Publication No.: US10553592B2Publication Date: 2020-02-04
- Inventor: Fei Zhou
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201710131234 20170307
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L21/8238 ; H01L29/66 ; H01L21/02 ; H01L21/321 ; H01L27/092 ; H01L21/762 ; H01L29/08

Abstract:
Semiconductor structure and fabrication method are provided. The method includes: providing a base substrate including a first region, a second region and a third region between the first and the second region; forming a dummy gate structure extending from the first region to the second region and through the third region; forming first doped source/drain regions in the base substrate on both sides of the dummy gate structure in the first region; forming second doped source/drain regions in the base substrate on both sides of the dummy gate structure in the second region; forming an opening in the dummy gate structure in the third region and exposing the base substrate in the third region; and forming an interlayer dielectric layer within the opening to have a top surface coplanar with the dummy gate structure.
Public/Granted literature
- US20180261606A1 SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF Public/Granted day:2018-09-13
Information query
IPC分类: