Invention Grant
- Patent Title: Method of manufacturing inductor with ferromagnetic cores
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Application No.: US15455569Application Date: 2017-03-10
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Publication No.: US10553354B2Publication Date: 2020-02-04
- Inventor: Kangguo Cheng , Juntao Li , Geng Wang , Qintao Zhang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01F41/04
- IPC: H01F41/04 ; H01F27/24 ; H01F27/28 ; H01F41/14

Abstract:
A method of making an inductor device includes forming a first metal layer and an ILD on a substrate, patterning a trench perpendicular to the first metal layer in the ILD, and depositing a magnetic material. The method includes depositing another ILD and patterning a via adjacent to the trench that extends from the first metal layer to a surface of the ILD. The method includes patterning trenches in the ILD, with a first portion over and adjacent to and parallel to the first metal layer, and a second portion perpendicular to the first portion and extending from an end of the first portion to the via. The first metal layer and trenches are connected to through the via. The method includes depositing a metal in the via, and depositing a metal in the trenches to form a second metal layer connected to the first metal layer through the via.
Public/Granted literature
- US20180261376A1 INDUCTOR WITH FERROMAGNETIC CORES Public/Granted day:2018-09-13
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